QTS Quest Technology

CLEANROOM SPECIFICATIONS

CLEANROOM SPECIFICATIONS

CLEANROOM STANDARDS

ISO 14644-1 : 2015
table 1: selected airborne particulate cleanliness classes for cleanrooms and clean zones

ISO
Classification
Number (N)
Maximum concentration limits (particles / m3 of air) for
particles equal to and larger than the considered sizes below
FED STD
209E
Nearest
equivalent
Class
BS5295
1989
Nearest
equivalent
Class
0.1µm 0.2µm 0.3µm 0.5µm 1µm 5µm
ISO Class 1 10 2
ISO Class 2 100 24 10 4
ISO Class 3 1000 237 102 35 8 1 C
ISO Class 4 10000 2370 1020 352 83 10 D
ISO Class 5 100 000 23 700 10 200 3520 832 29 100 E (F)
ISO Class 6 1 000 000 237 000 102 000 35 200 8320 293 1000 H (G)
ISO Class 7 352 000 83 200 2930 10 000 J
ISO Class 8 3 520 000 832 000 29 300 100 000 K
ISO Class 9 35 200 000 8 320 000 293 000
EU GMP ANNEX 1 : 2022
Maximum permitted total particle concentration for classification

Maxiumum limits for total particle
≥ 0.5 µm/m3
Maxiumum limits for total particle
≥ 0.5 µm/m3
Grade at rest in operation at rest in operation
A 3 520 3 520 Not specified Not specified
B 3 520 352 000 Not specified 2 930
C 352 000 3 520 000 2 930 29 300
D 3 520 000 Not predetermined 29 300 Not predetermined


Maximum permitted microbial contamination

Grade Air sample CFU/m3 Settle Plates
(diam.90mm) CFU/4 hours
Contact plates
(diam.55mm) CFU/plate
A No growth No growth No growth
B 10 5 5
C 100 50 25
D 200 100 50