CLEANROOM

BS EN ISO 14644- 1:1999.
table 1: selected airborne particulate cleanliness classes for cleanrooms and clean zones

ISO
Classification
Number (N)
Maximum concentration limits (particles / m3 of air) for
particles equal to and larger than the considered sizes below
FED STD
209E
Nearest
equivalent
Class
BS5295
1989
Nearest
equivalent
Class
0.1µm 0.2µm 0.3µm 0.5µm 1µm 5µm
ISO Class 1 10 2
ISO Class 2 100 24 10 4
ISO Class 3 1000 237 102 35 8 1 C
ISO Class 4 10000 2370 1020 352 83 10 D
ISO Class 5 100 000 23 700 10 200 3520 832 29 100 E (F)
ISO Class 6 1 000 000 237 000 102 000 35 200 8320 293 1000 H (G)
ISO Class 7 352 000 83 200 2930 10 000 J
ISO Class 8 3 520 000 832 000 29 300 100 000 K
ISO Class 9 35 200 000 8 320 000 293 000

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ANNEX 1 (2008)
airborne particulate classification

Maximum permitted number of particles/m3 equal to or above
Grade At rest In operation
0.5µm 5µm 0.5µm 5µm Class
A 3 520 20 3 520 20   29 5, 4.8
B 3 520 29 352 000 2 900    2 930 7, 7
C 352 000 2 900   2 930 3 520 000 29 000   29 300 8, 8
D 3 520 000 29 000   29 300 not defined not defined

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recommended limits for microbiological monitoring of clean areas during operation

Recommended limits for microbial containment
Grade Air sample cfu/m3 Settle Plates
(diam.90mm) cfu/4 hours
Contact plates
(diam.55mm) cfu/plate
Glove print 5
fingers cfu/glove
A <1 <1 <1 <1
B 10 5 5 5
C 100 50 25
D 200 100 50

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