CLEANROOM
ISO 14644- 1:2015.
table 1: selected airborne particulate cleanliness classes for cleanrooms and clean zones
| ISO Classification Number (N) |
Maximum concentration limits (particles / m3 of air) for particles equal to and larger than the considered sizes below |
FED STD 209ENearest equivalent Class |
BS5295 1989Nearest equivalent Class |
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| 0.1µm | 0.2µm | 0.3µm | 0.5µm | 1µm | 5µm | |||
| ISO Class 1 | 10 | 2 | ||||||
| ISO Class 2 | 100 | 24 | 10 | 4 | ||||
| ISO Class 3 | 1000 | 237 | 102 | 35 | 8 | 1 | C | |
| ISO Class 4 | 10000 | 2370 | 1020 | 352 | 83 | 10 | D | |
| ISO Class 5 | 100 000 | 23 700 | 10 200 | 3520 | 832 | 100 | E (F) | |
| ISO Class 6 | 1 000 000 | 237 000 | 102 000 | 35 200 | 8320 | 293 | 1000 | H (G) |
| ISO Class 7 | 352 000 | 83 200 | 2930 | 10 000 | J | |||
| ISO Class 8 | 3 520 000 | 832 000 | 29 300 | 100 000 | K | |||
| ISO Class 9 | 35 200 000 | 8 320 000 | 293 000 | |||||
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ANNEX 1
airborne particulate classification
airborne particulate classification
| Maximum permitted number of particles/m3 equal to or above | |||||
| Grade | At rest | In operation | |||
| 0.5µm | 5µm | 0.5µm | 5µm | ||
| A | 3 520 | Not applicable | 3 520 | Not applicable | |
| B | 3 520 | Not applicable | 352 000 | 2 900 | |
| C | 352 000 | 2 900 | 3 520 000 | 29 000 | |
| D | 3 520 000 | 29 000 | not defined | not defined | |
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recommended limits for microbiological monitoring of clean areas during operation
| Recommended limits for microbial containment | ||||
| Grade | Air sample cfu/m3 | Settle Plates (diam.90mm) cfu/4 hours |
Contact plates (diam.55mm) cfu/plate |
Glove print 5 fingers cfu/glove |
| A | <1 | <1 | <1 | <1 |
| B | 10 | 5 | 5 | 5 |
| C | 100 | 50 | 25 | – |
| D | 200 | 100 | 50 | – |
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